Physical and Technical Problems of SOI Structures and Devices
作者：
J·-P Colinge
|
Vladimir S·Lysenko
|
Alexei N·Nazarov
出版年： 1995-6
页数： 300
定价： $ 111.87
ISBN： 9780792336006
出版年： 1995-6
页数： 300
定价： $ 111.87
ISBN： 9780792336006
内容简介
In this text, specialists in silicon-on-insulator technology from both East and West meet, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely available to western scientists. Keynote lectures and state-of-the-art presentations give a wide-ranging panorama of the challenges posed by SOI materials and devices, material fabrication techniques, characterization, device and circuit issues.
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