Perspectives, Science and Technologies for Novel Silicon on Insulator Devices
作者:
Peter L·F·Hemment
|
V·S·Lysenko
|
A·N·Nazarov
出版年: 1999-12
页数: 368
定价: $ 111.87
ISBN: 9780792361169
出版年: 1999-12
页数: 368
定价: $ 111.87
ISBN: 9780792361169
内容简介
This concise volume contains the key papers presented during the International NATO Advanced Research Workshop on Silicon on Insulator device technologies. The authors have moved beyond reporting the current state of the technology to explore wider issues, from the economic aspects incorporating SOI and related materials into circuits and systems to consideration of low temperature electronics, quantum devices and MEMS.
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