Stress-induced Phenomena in Metallization
作者:
Ehrenfried Zschech
|
Shinichi Ogawa
|
Paul S·Ho
出版年: 2010-12
页数: 270
定价: $ 168.37
ISBN: 9780735408555
出版年: 2010-12
页数: 270
定价: $ 168.37
ISBN: 9780735408555
内容简介
One current challenge to micro- and nanoelectronics is the understanding of stress-related phenomena in metallization. Stresses arising in on-chip and 3D metal interconnects and in the surrounding ...
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